PROCESS CHAMBER FOR FABRICATING SEMICONDUCTOR TO SECURELY SEAL VIEW PORT PORTION AFTER CLEANING PROCESS WHILE EASILY CLEANING VIEW PORT PORTION IN CHAMBER CLEANING PROCESS

摘要

PURPOSE: A process chamber for fabricating a semiconductor is provided to securely seal a view port portion after a cleaning process while easily cleaning the view port portion in a chamber cleaning process by installing a view port hole and a view port window in a process chamber to monitor the inside of the process chamber from the outside. CONSTITUTION: A predetermined process is performed in a chamber body(161). A wafer is placed on a wafer chuck(163) installed in the chamber body. A view port portion is formed in the chamber to monitor the process state of the chamber from the outside of the chamber. A view port hole(166) passes through the inside and outside of the chamber. The view port hole is covered with a view port window to seal the inside of the chamber. The view port window is made of a transparent material to monitor the inside of the chamber from the outside of the chamber. A window position holding unit rotates the view port window by a predetermined angle to selectively make the view port window open/shut the view port hole, and forcibly stops the view port window when the view port window is rotated by a predetermined angle to be located in the position where the view port hole is covered. A coupling member couples the view port window to the chamber when the view port hole is covered with the view port window.