MAGNETIC BEARING DEVICE AND TURBO MOLECULAR PUMP FOR MOUNTING THE SAME THERETO FOR REDUCING MANUFACTURING COSTS REQUIRED FOR MOUNTING TURBO MOLECULAR PUMP

摘要

PURPOSE: A magnetic bearing device and a turbo molecular pump for mounting the same thereto are provided to reduce manufacturing costs required for mounting a turbo molecular pump by reducing a number of elements of an amplifier circuit for driving an electromagnet and a number of cables connected between the electromagnet and the amplifier circuit. CONSTITUTION: A magnetic bearing device includes a first magnetization control device and a second magnetization control device. The first magnetization control device includes a first switch element for supplying or interrupting a first supply current. The first switch element is controlled by a first control circuit. A first regenerative current is sent from a second electrode to a first electrode by a first rectification element. The second magnetization control device includes a second switch element for supplying or interrupting a second supply current. The second switch element is controlled by a second control circuit. A second regenerative current is sent from an assistant electrode(221b) to the second electrode by a second rectification element.