SURFACE TREATMENT METHOD BY CONTROLLING VARIATIONS OF ACCUMULATED INTENSITY OF ILLUMINATION OF ENERGY LIGHT ON SUBSTRATE TO 20 OR LOWER, SURFACE TREATMENT APPARATUS, SURFACE TREATED SUBSTRATE, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC DEVICE

摘要

PURPOSE: A surface treatment method, a surface treatment apparatus, a surface treated substrate, an electro-optical device, and an electronic device are provided to control a contact angle between a liquid member and a substrate even in case where the substrate is large. CONSTITUTION: A surface treatment method comprises a step of performing a hydrophobic process on a surface of a substrate(11); and a step of performing a hydrophilic process on the surface of the substrate by irradiating energy light on the surface passed through the step of hydrophobic process. Variations of accumulated intensity of illumination of the energy light on the surface of the substrate are controlled to 20% or lower.