DEVICE FOR WATER TREATMENT COMBINING COAGULATION BY ELECTROCHEMICAL TREATMENT AND FILTRATION TREATMENT AND METHOD FOR TREATING WATER USING THE SAME

摘要

Fine particles in a sol state and nitrogen components contained in CMP waste water are removed. The fine particles in a sol state contained in the CMP waste water are removed by a filter device in which a filter device 13 having a second filter of sol state is used. The nitrogen components contained in the CMP waste water are removed by an electrochemical treatment using an electrode 12. These filtering treatment and electrochemical treatment can be performed either in separate individual tanks or in a same tank. A water treatment apparatus with less space can be provided by performing the filtering treatment and the electrochemical treatment in a same tank.