METHOD OF MANUFACTURING HEAT SPREADER MODULE WITH HARD BRAZING MATERIAL LAYER CONTAINING PREDETERMINED AMOUNT OF Ti AND HEAT SPREADER MODULE

摘要

PURPOSE: A method of manufacturing a heat spreader module and the heat spreader module are provided to obtain a necessary bonding strength without an excessive hard brazing material by controlling exactly a supplied amount of hard brazing material and the amount of Ti contained in the hard brazing material. CONSTITUTION: A heat spreader module(10) includes at least a pedestal(12), a heat spreader member(14), an insulating substrate(22) and a metal plate. A plurality of hard brazing material layers(18,20,28,30) are supplied between the pedestal, the heat spreader member, the insulating substrate, and the metal plate. Each hard brazing material layer contains an active element. A bonding process is performed for the resultant structure by melting the hard brazing material layers. A predetermined amount of hard brazing material is supplied for the hard brazing material layer with a thickness of 3 to 20 m. The amount of the active element contained in the hard brazing material layer is in a range of 400 to 1000 g/cm¬2. The active element is Ti.