FAILURE ANALYZER WITH SOLID IMMERSION LENS EMBEDDED ANALYSIS PLATE

摘要

PURPOSE: A failure analyzer is provided to control freely an analysis range and to load stably a sample on a stage by using a solid immersion lens embedded analysis plate. CONSTITUTION: A failure analyzer includes an analysis plate and a failure detecting unit. The analysis plate(2) includes a first main surface for loading a sample(1) and a second main surface. The failure detecting unit(20) includes an optical system(21a) for detecting failures of the sample. A concavity is formed on the second main surface of the analysis plate. A convexity(2d) is formed at a bottom of the concavity. The convexity functions as a solid immersion lens. The failure detecting unit transmits/receives light to/from the convexity.