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APPARATUS FOR MEASURING THICKNESS AND REFRACTIVE INDEX OF MATERIAL IN REAL TIME USING SURFACE PLASMON RESONANCE PHENOMENON
APPARATUS FOR MEASURING THICKNESS AND REFRACTIVE INDEX OF MATERIAL IN REAL TIME USING SURFACE PLASMON RESONANCE PHENOMENON
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机译:利用表面等离振子共振现象实时测量材料的厚度和折射率的装置
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摘要
PURPOSE: An apparatus for measuring a thickness and a refractive index of a material in real time is provided to precisely measure the thickness and refractive index of the material in real time by using a planer optical system having a simple structure and by using a surface plasmon resonance phenomenon. CONSTITUTION: An apparatus measures a thickness and a refractive index of a material in real time by using a surface plasmon resonance phenomenon. A surface plasmon resonance measuring unit is provided in a planer optical system. A white light source(1) is provided for the measurement. White light radiated from the white light source(1) is focused onto a material by using a cylindrical lens(2). The cylindrical lens(2) includes a prism for converting a path of the light. The light incident into a CCD camera(6) includes information about characteristics of the material.
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