Spatial light modulator providing multiple bias level reset waveform for improved DMD control and method of operation

摘要

The DMD spatial light modulator 20 has an improved reset waveform that improves electrostatic control on the DMD mirror 30 during the switching state T3. During the mirror reset cycle T3 a sufficient middle bias level to maintain the voltage difference between the mirror / yoke and the address electrode 26, 28, 50, 52 to dynamically park the mirror during co- 32 and mirror 30, which voltage is insufficient to overcome the hinge resilience during reverse-state transitions, so that the mirror is released to a neutral region and is captured in a different state upon re-application of the bias voltage. The transition bias level is maintained for a time period T3 sufficient to cause the mirror / yoke to be released from the landing pad 82 to a sufficient distance towards the neutral position. The operational reliability of the device is improved by preventing incident light from escaping to the display aperture during the same-state mirror transition without interfering with the crossover of the mirror during the anti-state mirror transition. Large deviations between mirror-to-mirror can be tolerated without leaving the timing behavior parameters acceptable for the mirror array.