Method for the measurements of 3-dimensional surface topography and material distribution using friction signal

摘要

PURPOSE: A method for measurement of three-dimensional surface topography and material distribution is provided to accurately measure surfaces having height differences, while obtaining accurate and reliable material distribution using a simple friction force measurement device. CONSTITUTION: A method for measurement of three-dimensional surface topography and material distribution, comprises a first step of allowing an object of measurement to contact another object and slide in a predetermined direction such that a friction coefficient exists at a contact surface; a second step of generating a friction force during contact and sliding motion, and obtaining a friction signal from the friction force; and a third step of measuring surface topography, slope of material distribution and change of slop.