Fizeau interferometer using angled end-face optical fiber source

摘要

PURPOSE: A Fizeau interferometer using an oblique section fiber light source is provided to improve the reliability of measuring results by removing beam splitting elements from a measuring wavefront. CONSTITUTION: A Fizeau interferometer includes a single mode fiber(12), a laser generator(11) for outputting beams to the single mode fiber, a collimator for converting the light of the laser generator to the parallel light, a reference plate(17) for transmitting and reflecting the parallel light to a target(18) in order to generate a reference wavefront, and a CCD camera(14) for detecting an interference fringe of the reference wavefront. The Fizeau interferometer further includes an oblique section fiber light source which is coupled to the single mode fiber. A beam split coating layer is formed on an oblique section of the oblique section fiber light source.