METHOD FOR MEASURING CONTAMINATED DEGREE OF PHOTOSENSITIVE FILM CONTAMINATED WITH AMINE

摘要

PURPOSE: A method for measuring the contaminated degree of a photosensitive film contaminated with amine is provided to quantitatively analyze the degree contaminated with amine. CONSTITUTION: A method for measuring the contaminated degree of a photosensitive film contaminated with amine comprises processes of forming a chemical amplification-type photosensitive film pattern(1); exposing the photosensitive film pattern by a whole-surface exposure process; contaminating an amine group with the photosensitive film pattern; executing a PEB(Post Exposure Bake) process; cutting both ends of the photosensitive film pattern; and developing the photosensitive film pattern on the middle part. The method for measuring the contaminated degree quantitatively analyzes PED(Post Exposure Delay) stability by calculating the area of the remaining photosensitive film pattern.