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Large Crystal Growing Apparatus Having Vertical and Horizontal Temperature Gradients and Growing Method thereof
Large Crystal Growing Apparatus Having Vertical and Horizontal Temperature Gradients and Growing Method thereof
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机译:具有垂直和水平温度梯度的大型晶体生长装置及其生长方法
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摘要
PURPOSE: A growing apparatus of large crystal having vertical and horizontal temperature gradients is provided which removes limitation on a ratio of diameter (or width) to length of a crystal, substantially reduces growing time, and easily controls shape of the crystal, and a growing method of the large crystal is provided. CONSTITUTION: The growing apparatus of large crystal having vertical and horizontal temperature gradients comprises a crucible(1) in which a certain space is secured, and on the bottom of which a seed crystal of a crystal to be grown is mounted; first and second heating units(2a,2b) each of which are arranged adjacently to both sides of the crucible so as to melt charging materials charged into the crucible as a power source is impressed to the heating units, and cool the molten materials in the state that temperature gradients are given in such a manner that temperature is gradually increased in vertical and horizontal directions on the basis of a part where the seed crystal is positioned during growing of the crystal; and a cooling means(3) which is installed at the lower part of the crucible to forcibly cool the lower part of the crucible during the growth of the crystal, wherein the growing apparatus grows the crystal in vertical and horizontal directions at the same time. The growing method of large crystal comprises the steps of melting the crystal material after charging a crystal material to be grown into a crucible on the bottom of which a seed crystal of a crystal to be grown is mounted; and growing the crystal by slowly descending temperature in the state that temperature gradients are given so that temperature is gradually increased horizontally and vertically on the basis of a part where the seed crystal of the crucible is positioned.
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