CHEMICAL ADSORPTION SOLUTION AND METHOD OF PRODUCING CHEMICALLY ADSORBED FILM USING THE CHEMICAL ADSORPTION SOLUTION

摘要

The present invention provides a chemical adsorption solution prepared by dissolving a silane-based chemical adsorption material in a non-aqueous organic solvent, in which the non-aqueous organic solvent is a mixture including a first non-aqueous organic solvent and a second non-aqueous organic solvent having a boiling point higher than that of the first non-aqueous organic solvent. A preferable difference in the boiling point is at least 10 DEG C. Preferably, the first non-aqueous organic solvent has a boiling point of not more than 120 DEG C and the second non-aqueous organic solvent has a boiling point of not less than 150 DEG C. The chemical adsorption solution coated on a substrate is concentrated by evaporating the solvent having the lower boiling point, so that a chemically adsorbed film having a uniform film thickness can be formed in a short time. IMAGE