High Precision Direct Patterning Apparatus using Ultrashort Pulse Laser Beam

摘要

The present invention relates to ultra-precision machining apparatus using the ultrashort pulse laser beam, and the ultrashort pulse laser generator; Beam transfer unit consisting of an optical attenuator to control the power of the laser beam oscillated from the laser generating unit; And changing the direction of the laser beam to illuminate the illumination light source processing unit, and the unit comprising a vision imaging camera to measure processing section; Laser machining unit made of a light condensing portion which condenses the laser beam on the base material; In the laser processing apparatus in the stage transferring to mount the workpiece, consists of a PC-based control unit for real-time control all of the operations, the beam of Gaussian beam with flat top in the form of through an beam uniform flattening of the spatial distribution of the laser beam in other surface processed into it relates to ultra-precision machining apparatus using the ultrashort pulse laser beam, characterized in that to improve the accuracy and the surface roughness of the edge.