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Lens holder used in lithography for wafer inspection has an external fastening and inner optical element with elastomeric vibration damper between outer and inner sections
Lens holder used in lithography for wafer inspection has an external fastening and inner optical element with elastomeric vibration damper between outer and inner sections
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机译:用于光刻的用于晶片检查的透镜架具有外部固定装置和内部光学元件,外部和内部之间具有弹性减震器
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摘要
A component comprises an exterior fastening and an optical element, preferably in an inner holder, comprising sprung bridges between the outer holder and inner region. An internal space between the bridges and fastening comprises at least partly an elastomeric vibration damping connection.
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