Test instrument calibration method employs a measurement length standard in the form of a silicon strip with grooves in its surface, with calibration carried out with the strip in two different inclinations

摘要

Method for calibrating a test instrument (1) against a measurement length standard (21). The standard comprises a silicon strip with grooves (34) in its surface. The standard is sampled in two different pivoted positions. From the measurement values taken in the two positions, the length of the test instrument test arm (6) and the height of a sampling feeler element (8) are determined. An Independent claim is made for a calibration device for calibration of a test instrument using a measurement length standard.