Catadioptric microscopic objective for UV light in semiconductor production and testing has massive lens body in refractive section and off axis reflection

摘要

An imaging objective, especially for microscopy, comprises at least one catadioptric part (1') having an optical axis and a massive body refractive section (5') with first and second faces (5.1',5.2') along the optical axis and a reflective section (5.3') distanced from the optical axis.