Fabry-Perot interferometer resonant frequency measurement method, which is applicable to a micro-mechanically tunable interferometer, involves measurement of the capacitance of electrodes attached to the cavity mirrors

摘要

Method for absolute measurement of the resonant frequency of a micro-mechanically tunable Fabry-Perot interferometer, whereby the resonant frequency or wavelength is determined from a filtered signal by determination of the capacitance between two electrodes attached to mirror surfaces of the interferometer cavity in areas of the mirrors that are optically not used.