Correction process for a total image error of an imaging group optical component separates symmetrical and asymmetrical components and selects degrees of freedom

摘要

A correction process for a total image error of an imaging group (1) optical components (2,3) comprises measuring the error and splitting into a symmetrical component which is symmetrical to with respect to a plane of the image field (5) and separating and correcting the symmetrical and asymmetrical parts with their degrees of freedom.