Image generating energy filter for electrically charged particles has transfer lens device between first/second energy analyzer output and input planes with negative lateral, angular magnification

摘要

The device has at least two toroidal energy analyzers in series, at least one with stops in its input and output planes, a transfer lens device (20) between the output (5) and input (6) planes of the first and second energy analyzers (30,40) with negative lateral magnification and negative angular magnification, image rotation and a telescopic beam path, identical deflection angles and energy dispersion planes rotated relative to each other.