Differential or absolute pressure sensor comprising silicon support plates sandwiching a silicon membrane plate that are bonded together at a temperature between 300 and 500 degrees centigrade

摘要

Pressure sensor has two support plates (3, 4) made from silicon wafers with a membrane plate (2) arranged between them. The membrane plate is also made from silicon. The silicon plates are pretreated with a plasma and then directly bonded to each other at a temperature between 300 and 500degreesC.