Micromechanical structure has discharge arrangement that reduces potential difference between elements if potential difference positive and exceeds first value and/or negative and than second value

摘要

The structure has a mechanically deflectable first element and a second element, whereby the first element can be deflected by a potential difference between the first and second elements. A discharge arrangement diminishes a potential difference between the elements if the potential difference is positive and exceeds a defined first value and/or the potential difference is negative and is lower than a defined second value.