A method for the production of a slightly inclined homeotropic alignment of liquid crystals, electrooptical liquid crystal - device and liquid crystal - light valve

摘要

PURPOSE: To make it possible to introduce perpendicular orientation having a slight inclination into liquid crystal layers by simple one stage of film formation by depositing inorg. matter by vacuum evaporation on substrates in compliance with specific conditions, thereby forming oriented films. ;CONSTITUTION: A vacuum chamber 101 is internally provided with an evaporating source 102, a substrate holding mechanism 104 and a film thickness gage 105. This film thickness gage 105 is installed in a perpendicular direction equidistantly to the substrates from the evaporating source 102. Plural pieces of the substrates are set in a holding jig 103 and this holding jig is set in a holding mechanism 104 having positioning and rotating mechanisms in such a manner that the substrates can be held at a prescribed angle with the splashing direction of the evaporating material from the evaporating source 102. The inorg. matter is deposited by vacuum evaporation from the specified direction inclined with the normal direction of the substrates, by which the oriented films are formed. The conditions under which the oriented films are formed are so set that the incident angle viewed from the direction parallel with the substrates is ≥45 to ≤70° and that the film thickness measured by the film thickness gage 105 at the time of the film formation is ≥20 to ≤500nm.;COPYRIGHT: (C)1996,JPO