Magnetic levitation actuator, for use in micro-electro-mechanical systems (MEMS), comprises a mobile magnetic part, stationary magnetic parts, and means for starting movements

摘要

The magnetic actuator comprises a mobile magnetic part (4), stationary magnetic parts (5), and means (6) for starting movements of the mobile part with respect to the stationary parts. The device comprises two magnetic supports (1,2) placed in different planes which demarcate a space (5) where the mobile part (4) is in the state of levitation due to a magnetic guiding by the stationary magnetic parts until the mobile part comes to a limiting zone (10,20) at one of the two supports (1,2). The stationary magnetic parts (5) are joined with the respective supports (1,2), and the limiting zones (10,20) are distinct from the stationary magnetic parts. The mobile magnetic part (4) comprises a magnet (40), and the stationary magnetic parts (5) comprise magnetic pieces (51,52,53,54). Each stationary part (5) comprises a pair of pieces (51,52), (53,54) on the supports (1,2). The means (6) for starting movements of the mobile part (4) are carried by one or both supports (1,2). The means (6) are with magnetic effect, by heating the stationary magnetic parts above the Curie temperature, by creating a magnetic field in the vicinity of the mobile magnetic part, by current-carrying conductors in the vicinity of the mobile part, possibly with a set of stable positions of levitation, or pneumatic or hydraulic. The stationary magnetic parts are made of a material which is magnetically soft, magnetically hard, with hysteresis, super-conducting, dia magnetic, or a combination. The magnetization of the stationary parts and of the mobile part are in the same direction. The mobile part (4) comprises a reflector (mirror) (50) which can pass through a slit (501) in the first support (1). The supports (1,2) are made of a material which is a semiconductor, a dielectric, a conductor or a combination. A matrix (claimed) of magnetic actuators comprises a set of magnetic actuators on the same support. A method (claimed) for manufacturing the magnetic actuator (claimed) comprises the steps of (i) making a removable frame on the first a magnetic substrate along the contour of the mobile magnetic part, (ii) depositing a first dielectric layer and making wells for receiving the stationary magnetic parts, (iii) depositing the stationary magnetic parts, (iv) depositing a second dielectric layer and making wells for receiving the mobile magnetic part and the conductors of the starting means, (v) making trenches by etching up to the removable frame, (vi) assembling the first turned substrate with the second substrate with spacers between the two substrates to demarcate the space (3), and (vii) etching the first substrate and eliminating the removable layer so to free the mobile part.