Car inflatable bag/medical/aircraft micro electro mechanical system components having substrate assembly sensitive element/electrical connection contact pad with limiting channel/covering cap

摘要

The microstructure has a substrate (6) with a sensitive element (1) connected to a contact pad (3). The sensitive element, electrical connection and contact pad form an assembly with a limiting channel (11) and covering cap (5). There is an opening (12) above the contact pad and a zone (9) by the side of the channel.