Optical surface inspection method using reflectometry, wherein a surface measurement spectrum is compared with successive trial spectra for arbitrary structures and then adjusted in an iterative manner

摘要

Optical surface inspection method in which a measurement spectrum is obtained from a surface with relief structure and then compared with representative trial spectra for arbitrary structures that are adjusted in an iterative manner. A correlation of representative points of the spectra are selected and structure determination optimized by a hierarchical parameter adjustment.