REGENERATING AND RECOVERING APPARATUS FOR CARBON DIOXIDE USED IN CLEANING APPARATUS OR DRYING APPARATUS WHICH USES SUPERCRITICAL OR LIQUID CARBON DIOXIDE

摘要

PROBLEM TO BE SOLVED: To obtain a regenerating and recovering apparatus for carbon dioxide used in a cleaning apparatus or a drying apparatus which uses supercritical or liquid carbon dioxide, the regenerating and recovering apparatus which can continuously separate unnecessary components from the carbon dioxide used in a cleaning apparatus or a drying apparatus using supercritical or liquid carbon dioxide and which can decrease the residual component of the recovered carbon dioxide to a specified value.;SOLUTION: The regenerating and recovering apparatus for carbon dioxide used in a cleaning apparatus or a drying apparatus which uses supercritical or liquid carbon dioxide is composed of: a gas liquid separating mechanism which decreases the pressure of discharged fluid from the cleaning apparatus or the like using supercritical or liquid carbon dioxide and separates gas from the liquid of the discharged fluid; and a liquefying and refining mechanism which liquefies and refines carbon dioxide as the separated gas by the gas liquid separating mechanism.;COPYRIGHT: (C)2006,JPO&NCIPI