ELECTRODE FOR PLASMA GENERATION, PLASMA GENERATOR, AND PLASMA TREATMENT DEVICE

摘要

PPROBLEM TO BE SOLVED: To provide a plasma-generating electrode capable of stably and surely generating discharge between opposing electrodes and continuously generating plasma with ease, and to provide a plasma generator and a plasma treatment device. PSOLUTION: On the plasma-generating electrode 4 for generating plasma between electrodes 4a, 4b, sharp protrusions 4g facing each other are formed at least on one electrode 4a of the electrode A so as to generate a discharge between the protrusion 4g and the electrode 4b at another side, and to generate a plasma. The sharp protrusions 4g may be formed in any shape. If only any fluid is made to flow from a flow feeder 7, required air plasma or liquid plasma can be generated. If a matter to be treated is treated with the plasma, a plasma device such as a film-forming device, a processing device, and a powder treatment device can be constituted. PCOPYRIGHT: (C)2006,JPO&NCIPI