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PROCESS CONTROL METHOD, DEVICE USING IT, METHOD FOR PRODUCING SHEET-SHAPED OBJECT, AND SHEET-SHAPED OBJECT
PROCESS CONTROL METHOD, DEVICE USING IT, METHOD FOR PRODUCING SHEET-SHAPED OBJECT, AND SHEET-SHAPED OBJECT
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机译:过程控制方法,使用该方法的设备,板状物体的制造方法以及板状物体
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摘要
PROBLEM TO BE SOLVED: To accurately control a control object that varies little by correcting a deviation due to a difference in accuracy between devices.;SOLUTION: In a process by which a control output value calculated in a computing process of PID control is numerically converted by a numerical conversion part 16 into a control output value within a predetermined range, a deviation caused by a difference in accuracy between digital computation and a D/A converter 17 is corrected by a correction computing part 16A into both an actual control output value after the numerical conversion and an output time. The actual control output value after the correction is D/A converted and outputted to an electric power controller 14.;COPYRIGHT: (C)2006,JPO&NCIPI
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