SUPERHIGH HARDNESS THIN FILM

摘要

PROBLEM TO BE SOLVED: To obtain a thin film which can be industrially stably and easily deposited, further has superhigh hardness exceeding that of cubic BN which is considered to exhibit high hardness next to that of diamond, and also has extremely high friction-wear resistance.;SOLUTION: The thin film is composed of at least one kind of element selected from Ti and Cr of 10 to 70 atomic% in total, 0.1 to 20 atomic% B and 10 to 70 atomic% N.;COPYRIGHT: (C)2005,JPO&NCIPI