SUPER HARD MATERIAL HAVING METAL OXYCARBIDE SINGLE CRYSTAL COATING AND ITS PRODUCING METHOD

摘要

PROBLEM TO BE SOLVED: To form a single crystal of a metal oxycarbide and to provide a super hard material coated with the single crystal of the metal oxycarbide.;SOLUTION: The super hard material consists of: a magnesium oxide single crystal or a silicon single crystal; and a single crystal coating of an oxycarbide of a metal selected from molybdenum, chromium and tungsten which is formed on the single crystal. The super hard material is produced by subjecting a metal selected from molybdenum, chromium and tungsten and a carbon oxide or a carbon oxide and a hydrocarbon to a plasma reaction in the presence of the magnesium oxide single crystal substrate or the silicon single crystal substrate kept at 350 to 450°C so as to epitaxially grow the metal oxycarbide single crystal on the surface of the substrate.;COPYRIGHT: (C)2005,JPO&NCIPI