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SOLID ELECTROLYTE TYPE GAS SENSOR, SOLID ELECTROLYTE TYPE GAS SENSOR STRUCTURE, AND GAS CONCENTRATION MEASURING APPARATUS
SOLID ELECTROLYTE TYPE GAS SENSOR, SOLID ELECTROLYTE TYPE GAS SENSOR STRUCTURE, AND GAS CONCENTRATION MEASURING APPARATUS
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机译:固体电解质型气体传感器,固体电解质型气体传感器结构和气体浓度测量装置
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摘要
PROBLEM TO BE SOLVED: To provide a solid electrolyte type gas sensor and a gas concentration measuring apparatus of high measuring precision and measuring sensitivity for a gas concentration reduced in temperature differences between both faces and on the same face of a solid electrolyte substrate inside, in a limiting current type gas sensor using a solid electrolyte substrate.;SOLUTION: This limiting current type solid electrolyte gas sensor has the solid electrolyte substrate formed with a pair of electrode films on its both faces, a gas diffusion rate-limiting part forming substrate with at least one portion joined directly onto the first face of the solid electrolyte substrate or via other member arranged in an outer circumference of the electrode films to form a gas diffusion rate-limiting hole, and a gas flow part forming substrate with at least one portion joined directly onto the second face of the solid electrolyte substrate or via other member arranged in the outer circumference of the electrode films to form a gas flow hole, and the gas diffusion rate-limiting part forming substrate and the gas flow part forming substrate are a ceramic substrate or a porous substrate.;COPYRIGHT: (C)2005,JPO&NCIPI
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