SURFACE IRREGULARITY MEASURING/EVALUATING METHOD AND SYSTEM, SURFACE IRREGULARITY EVALUATION DEVICE, AND PROGRAM OF SURFACE IRREGULARITY MEASURING/EVALUATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a measuring/evaluating method or the like capable of measurement/evaluation to the degree of quantitative roping having excellent reproducibility or the like without depending on human sensitivity.;SOLUTION: This method has a process for irradiating the measuring object surface with light by a metal halide light source 12 at a prescribed incident angle, a process for receiving light reflected from the surface at an angle corresponding to a reflection angle approximately equal to the incident angle by a CCD camera 15, and converting the reflected light into data of a light intensity distribution, and a process for calculating by an operation device 17 by using an intensity change of light on the surface as an index based on the data.;COPYRIGHT: (C)2005,JPO&NCIPI