CELL DRIVE TYPE PIEZOELECTRIC ACTUATOR AND METHOD OF MANUFACTURING CELL DRIVE TYPE PIEZOELECTRIC ACTUATOR

摘要

PPROBLEM TO BE SOLVED: To provide an ink jet head capable of implementing further reduction of crosstalk, further improvement in displacement efficiency, improvement in drive reliability, and improvement in packaging characteristic, and capable of meeting demand such as resolution and printing speed required for the latest printing apparatus. PSOLUTION: The cell drive type piezoelectric actuator comprises a plurality of cell drivers 20 having an wall portion 22 and a cell 3 defined by the wall portion 22. Each of the plurality of cell drivers 20 comprises a piezoelectric operating portion 4 comprising a piezoelectric substance 14 and at least one pair of electrodes 18 and 19 in the wall portion 22. The cell drive type piezoelectric actuator 1 in which the volume of a cell 3 is changed with the displacement of the piezoelectric operating portion 4 is applied as an inkjet head. The cell drive type piezoelectric actuator 1 comprises at least one pair of support bodies 21. The plurality of cell drivers 20 are built completely independently in series such that at least one pair of support bodies are bridged with the drivers. The cell driver 20 and the support body 21 are calcined to be integrated with each other. PCOPYRIGHT: (C)2005,JPO&NCIPI