POLISHING CARRIER FOR POLISHING PROCESS OF SPACER FOR PLANAR PANEL DISPLAY, AND KEEPER

摘要

PROBLEM TO BE SOLVED: To improve working efficiency by realizing the cleaning of a carrier (a polishing carrier) 8 by easily detaching a keeper 4, when abrasive grains and polish tailings or the like are unevenly dispersed, by integrating the carrier and a guide ring which are separated in a conventional polishing method.;SOLUTION: The carrier 3 and the guide ring 6 are integrated in the polishing carrier 8. For the smooth detachment at the time of detaching the keeper 4 from the polishing carrier 8, it is preferable that the internal side face of the polishing carrier 8 and the external side face of the keeper 4 have a smooth face without protrusions and unevenness. Further, it is preferable that a gap, through which the smooth detachment can be executed, is provided between the internal side face of the polishing carrier 8 and the external side face of the keeper 4.;COPYRIGHT: (C)2005,JPO&NCIPI