SUPPLY AMOUNT EXCESS/DEFICIENCY CORRECTING DEVICE FOR BATCH PROCESS SYSTEM

摘要

PROBLEM TO BE SOLVED: To easily stabilize the repeated supply of a constant amount, by using a previous excess/deficiency information as a correction value.;SOLUTION: In a supply amount excess/deficiency correcting device for a batch process system, an actual supply amount is integrated with a flow rate signal from a flowmeter 4 when a fluid passes, and the excess/deficiency between the actual supply amount and a set value is predicted in advance for inputting/adding a corrective value at a first constant amount supply operation. In a second constant amount supply operation, a difference between a previous approximate meterage value which occurs at a previous constant amount supply operation and a set value is added to the previous correction value, to acquire a new corrective value. At a next constant amount supply operation on, a new corrective value calculated and processed each time is automatically added to the actual supply amount. Even if the back pressure or the like of a supply pump changes, a meterage value corresponding to it is acquired properly, and the error from the set value is significantly reduced. Since no data collection is required in advance, a batch process operation requires no long time, and processing is made easy.;COPYRIGHT: (C)2005,JPO&NCIPI