COMPOUND MICROSCOPE EQUIPPED WITH PROBE, METHOD OF CALCULATING HEIGHT OF PROBE, AND METHOD OF DRIVING PROBE

摘要

PROBLEM TO BE SOLVED: To acquire a distance from a probe to a test sample, to drive the probe at a optimal probe speed proportional to the distance, and to stop driving the probe when the distance from the probe to the test sample becomes zero.;SOLUTION: A compound microscope equipped with a probe comprises: a stage on which two or more microscopes 1, 2 that allow observation of substantially the same point of a test sample and a test sample 6 are placed; a mechanical probe 3 for bringing the microscopes closer to or into contact with the test sample; a driving mechanism 14 for driving the mechanical probe; a measurement processing unit 10 for measuring an apparent distance from the test sample to the probe from images acquired from the two or more microscopes; and a measured data processing unit 12 for calculating an actual distance from the test sample to the probe based on two or more measured values and posture information (θ) of the microscopes, thereby accurately grasping the distance from the test sample to the probe.;COPYRIGHT: (C)2005,JPO&NCIPI