SPOT POSITION DETECTION METHOD, METHOD FOR CALCULATING DISTANCE BETWEEN SPOTS, AND METHOD FOR ADJUSTING DISTANCE BETWEEN SPOTS

摘要

PROBLEM TO BE SOLVED: To adjust a distance between spots between sub-beams by an inexpensive device.;SOLUTION: By using a micrometer 66 to move a reflection plate 60, the spot positions of two sub-beams SB_-1 and SB₊₁ are detected, and a distance Ds between the spots thereof is measured (calculated) to be adjusted. The reflection plate 60 has a boundary between a reflection surface 61 and a nonreflecction surface 62. The position of a laser spot is specified by this boundary.;COPYRIGHT: (C)2006,JPO&NCIPI