ROTATIONAL ERROR MEASURING METHOD OF IMAGE PICK-UP MEANS, ADJUSTMENT METHOD OR MEASURING METHOD USING THE SAME, POSITION MEASURING APPARATUS WHICH USES ROTATIONAL ERROR MEASURED THEREBY, AND EXPOSURE DEVICE EQUIPPED THEREWITH

摘要

PROBLEM TO BE SOLVED: To provide a method for measuring rotational error of installation position to a mark for position detection of an image pick-up means which picturizes the mark for position detection.;SOLUTION: The measuring range 26d of a CCD camera 26a is moved to the upper side 26d1 of a non-measuring direction, an alignment mark AM1 is moved to the upper side of the non-measuring direction of a moving coordinate, and location information of the mark AM1 is obtained in the state wherein image formation of the image of the mark AM1 is performed in the measuring range 26d. The measuring range 26d is moved to the lower side 26d2 of the non-measuring direction, the alignment mark AM1 is moved to the lower side of the non-measuring direction of the moving coordinate, and location information of the mark AM1 is obtained similarly in the state that image formation of the image of the mark AM1 is performed in the measuring range 26d. Rotational error RE is obtained based on location informations of the alignment mark AM1 which are asked at one side and the other side of the non-measuring direction respectively, and on migration length of the mark AM1 or distance between the measuring ranges 26d1 and 26d2.;COPYRIGHT: (C)2005,JPO&NCIPI