RESPONSE CHARACTERISTIC ADJUSTING METHOD FOR OPTICAL MODULATING ELEMENT, OPTICAL MODULATING ELEMENT, OPTICAL MODULATING ELEMENT ARRAY, AND IMAGE FORMING APPARATUS

摘要

PROBLEM TO BE SOLVED: To shorten a drive cycle by obtaining a response characteristic adjusting method for an optical modulating element that enables early writing without causing malfunction, the optical modulating element, an optical modulating element array, and an image forming apparatus.;SOLUTION: Disclosed is the response characteristic adjusting method for an optical modulating element of a micro-electromechanical system which has a movable part supported in a hollow 63 in an elastically displaceable state and partially equipped with a movable electrode and a fixed electrode arranged opposite the movable part, and modulates light incident on a movable part by moving the movable part with an electrostatic force generated according to a voltage applied between the movable electrode and fixed electrode; and at least the movable part is covered with an airtight sealing member 53 and the pressure in the airtight sealing member 53 is controlled to adjust a response characteristic of displacement of the movable part.;COPYRIGHT: (C)2005,JPO&NCIPI