HELIUM GAS LEAK DETECTOR AND HELIUM GAS LEAK DETECTION METHOD

摘要

PROBLEM TO BE SOLVED: To easily detect the presence or the absence of leakage of helium gas, and to further reduce the weight, size, and cost of a detector.;SOLUTION: Helium gas, which leaks from the inside of an object 13 to be tested by the operation of a suction pump 6, is sucked by a sniffer probe 2, the helium gas sucked into a container 11 whose pressure is reduced by the operation of a vacuum pump 9 is introduced partially, and the leakage of helium gas is detected, based on the output from an output circuit 10 according to a change in the electric resistance of a filament 12 accompanying the temperature changes in the filament 12 by the collisions between the helium gas introduced and the heated filament 12.;COPYRIGHT: (C)2005,JPO&NCIPI