METHOD FOR MACHINING SMALL HOLE IN CERAMIC MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a method for machining a small hole in a highly accurate ceramic material.;SOLUTION: This method relates to forming of the small hole 13 by performing electric discharge machining of the ceramic material 11 having weak thermal shock resistance and poor conductivity by using a tubular electrode 12. Conductive films 16 and 17 are formed on at least a surface of the ceramic material 11. The conductive films 16 and 17 are made as an electrode B which is made as a pair with the electrode 12. By gradually pushing and lowering the electrode 12, while supplying pulse current between the electrode 12 and the electrode B in a state of oil supplied to a machining part 14 from the electrode 12, the small hole 13 is formed in the ceramic material 11.;COPYRIGHT: (C)2006,JPO&NCIPI