GRID OF SPACER STRUCTURE, MANUFACTURING METHOD AND MANUFACTURING DEVICE OF SPACER STRUCTURE, AND INSPECTION METHOD AND INSPECTION DEVICE OF SPACER STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a grid capable of positioning a spacer in high accuracy at the grid of the spacer structure, a manufacturing method and a manufacturing device of this spacer structure, and an inspection method and an inspection device of the spacer structure.;SOLUTION: A plurality of reference holes 71 are formed beforehand for a specific spacer on a grid 24 of a spacer structure incorporated in a SED. When the spacer structure is manufactured, it is lighted by a surface light source 72 from the rear side of a grid 24, and the transmission light of the reference hole 71 is photographed by a camera 74, and the spacer forming material 46 filled in the spacer forming hole of the punch 36a is lighted by two opposed light sources 78a, 78b from an angle of 5-15 degrees, and the spacer forming material 46 is photographed by the camera 74. The operator moves the grid 24 and the punch 36a relatively by observing the photographed image displayed through a monitor 76 and positions the spacer to the grid 24.;COPYRIGHT: (C)2005,JPO&NCIPI