ORIENTATION CONTROL METHOD OF LIQUID CRYSTAL COMPOUND THIN FILM, FILM TEXTURE OF LIQUID CRYSTAL COMPOUND THIN FILM FORMED BY USING THE SAME, TFT, AND ORGANIC ELECTROLUMINESCENT ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a means wherein arrangement is controlled arbitrarily without being based on rubbing of an orientation film, and conductivity of the direction of film thickness and conductivity of the specific direction parallel to a film surface are increased remarkably in cylindrical liquid crystal compound.;SOLUTION: After oblique evaporation of the cylindrical liquid crystal compound is performed on the surface of a substrate by a PVD method and an evaporated film is formed, the evaporated film is heat-treated in temperature region of smectic phase of this compound. Moreover, oblique evaporation is performed by vacuum vapor deposition as the PVD method. Further, the heat treatment is performed within temperature range which is one half of a high temperature level of the smectic phase temperature region of the liquid crystal compound for depositing.;COPYRIGHT: (C)2005,JPO&NCIPI