METHOD OF PRODUCING ALUMINA FILM CONSISTING MAINLY OF amp;alpha; TYPE CRYSTAL STRUCTURE, MEMBER COATED WITH ALUMINA FILM CONSISTING MAINLY OF amp;alpha; TYPE CRYSTAL STRUCTURE, AND ITS PRODUCTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method of forming an alumina film consisting mainly of an α type crystal structure on a base material of various kinds (including the one obtained by previously forming a substrate film on a base material) without forming a specified intermediate layer.;SOLUTION: The surface of a base material (including the one obtained by previously forming a substrate film on a base material) is subjected to metal ion bombardment treatment, thereafter, the surface is subjected to oxidation treatment, and subsequently, an alumina film is formed thereon.;COPYRIGHT: (C)2005,JPO&NCIPI