NANO SCALE FIELD EFFECT ELEMENT HAVING AIR GAP BETWEEN SOURCE ELECTRODE AND DRAIN ELECTRODE PROCESSED WITH FINE METAL PARTICLE COATED WITH THIOL OR DISULFIDE MOLECULE

摘要

PROBLEM TO BE SOLVED: To provide a nanometer scale field effect element exhibiting good reproducibility of signal.;SOLUTION: In a field effect element comprising a source electrode S, a gate electrode, and a drain electrode D fabricated in a semiconductor substrate in nanometer scale, a space above the semiconductor substrate connecting the source electrode and the drain electrode is processed with fine metal particles coated with thiol or disulfide represented by general formula CH₃(CH₂)_nSH or (CH₃(CH₂)_nSH-)₂ (in the formula, n is an integer of 3-30).;COPYRIGHT: (C)2005,JPO&NCIPI