PLANE WAVEGUIDE ROUTING TYPE FILTER WITH DISTRIBUTED REFRACTIVE INDEX TYPE LENS

摘要

PROBLEM TO BE SOLVED: To realize a high performance WDM filter composed of a passive alignment.;SOLUTION: Waveguides 2-2, 2-3 and 2-4 are formed on a Si substrate 2-1 and a V-shaped groove 2-8 is also formed with an anisotropic etching. The V-shaped groove 2-8 is formed having an accurate angle because the V-shaped groove 2-8 is formed with the anisotropic etching. A cylindrical GRIN lenses 2-5 and 2-7 are fixed in the V-shaped groove 2-8 and a multilayer thin film filter 2-6 is arranged. The cylindrical GRIN lenses 2-5 and 2-7 obtain higher positional accuracy by being inserted into the V-shaped groove 2-8, the GRIN lenses 2-5 and 2-7 and the waveguides 2-2, 2-3 and 2-4 are connected with high accuracy, thus a high performance WDM filter is obtained.;COPYRIGHT: (C)2006,JPO&NCIPI