MEASURING METHOD FOR INTENSITY DISTRIBUTION OF ELECTRON BEAMS AND INTENSITY DISTRIBUTION MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method and a device capable of measuring directly the intensity distribution of electron beams, and capable of measuring the intensity distribution of electron beams with a high measuring accuracy.;SOLUTION: First, electron beams 15 are scanned in a perpendicular direction (u direction) to a knife edge 32c of a shielding means 32 (step S10), and integrate values in v direction of electric current intensities of the electron beams 15 detected by a sensor 36 are measured (step S12). Next, the integrated values obtained in the step S12 are differentiated for each scanning step (u) of the electron beams, and p(u, θ) is computed (step S14). Then, the shielding means 32 and the sensor 36 are rotated simultaneously (step S16), steps S10 to S14 are repeated, and integrated values p(u, θ) are determined with respect to all θ (step S18). And, F(Rcosθ, Rsinθ)(=F(X, Y)) is computed, and intensity distributions of electron beams are computed through an inverse Fourier transformation (step S20).;COPYRIGHT: (C)2006,JPO&NCIPI