PRODUCTION INSTRUCTION PLAN CREATION SYSTEM

摘要

PPROBLEM TO BE SOLVED: To provide a means for creating a production instruction plan in real time without causing unnecessary delay of a production lot accompanied by state change in facilities or in a lot, in a processing process of a thin film represented by semiconductor and liquid crystal, which has many facilities and processes required for production, can be processed by one process only and has a plurality of substitution facilities. PSOLUTION: A status change event 1 is received by an event receiving means 2 and an event analysis means 3 analyzes whether it results from a lot or facilities. In the case that the event results from the lot, a processable facility collection means 10, a processable facility evaluation means 11 and an allocation facility determining means 12 determine a facility to process the lot next and then a production order of the facility is determined by using an in-progress lot collection means 5, a process lot evaluation means 6 and a production instruction order determining means 7 as well as in the case of an event resulting from a facility, and the production instruction plan is created. PCOPYRIGHT: (C)2005,JPO&NCIPI