COLD CATHODE FIELD EMISSION DEVICE, COLD CATHODE FIELD EMISSION DISPLAY DEVICE, AND THEIR MANUFACTURING METHODS

摘要

PROBLEM TO BE SOLVED: To provide a cold cathode field emission device excellent in light emitting property, having reliable emitters, made possible to reduce a drive voltage and improve focus property, a cold cathode electric field electron emitting display device including this element, and their manufacturing methods.;SOLUTION: The cold cathode field emission display element 26 comprises a field emission device 1, comprising a three pole structure which comprises a cathode 6, a gate electrode 4 and an emitter 7 which is an electron emitting part connected to the cathode 6 on a substrate 3. The cathode 6 and the emitter 7 are made in order on a lower gate electrode 13 and an insulation layer 5 on the substrate 3 and a columnar gate electrode 12 is formed to face to the emitter 7. A gate electrode 4 comprises the lower gate electrode 13 and a columnar gate electrode 12.;COPYRIGHT: (C)2005,JPO&NCIPI